TDK Counts on Lithography Solutions from SUSS MicroTec

GARCHING, Germany--()--SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, has received a large order for various lithography tools from TDK in Q4 2014. Delivery and installation will take place already in the first quarter 2015. Based in Tokyo, Japan, TDK develops, manufactures and markets, among others, electronic components, modules and systems, focusing on fast-growing leading-edge technology markets, which include information and communications technology, automotive electronics, industrial electronics and consumer electronics.

The double-digit million euro order is for several Mask Aligners and Coater/Developer-Clusters for serial production. These tools are designed for advanced packaging applications for high frequency filters that are used in smartphones and tablets. With the installation of these SUSS MicroTec tools, TDK is increasing its production capacity in Munich.

"We chose the lithography tools from SUSS MicroTec because we need a reliable and competent technology partner for our sophisticated applications, such as the new die-sized SAW packages (DSSP(R)). Quality and cost of ownership are very important for us. Besides that, SUSS MicroTec offered short and flexible delivery times, which is crucial in this demanding market environment," says Otto Graf, Chief Operating Officer of TDK's Systems, Acoustics, Waves Business Group.

"For many years now, we have a very good relationship with TDK, one of our most important customers in Europe. I am very pleased that handling fragile wafers as well as 3D lithography, two of our core competencies, were crucial for receiving this order. The close cooperation with an innovation driver like TDK allows us to develop our high-tech systems further," says Walter Braun, Chief Operating Officer of SUSS MicroTec AG.

About SUSS MicroTec

SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit:

Language: English
Company: SÜSS MicroTec AG
Schleissheimer Strasse 90 85748 Garching Germany
Phone: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451



ISIN: DE000A1K0235
WKN: A1K023
Listed: Regulated Market in Frankfurt (Prime Standard); Regulated Unofficial Market in Berlin, Dusseldorf, Hamburg, Munich, Stuttgart


SUSS MicroTec AG
Franka Schielke
Tel:+49 (0)89 32007-161
Fax: +49 (0)89 32007-451


SÜSS MicroTec AG